000 00353nam a2200133Ia 4500
008 180816s9999 xx 000 0 und d
020 _a0500680108
082 _a686.2315
_bVIC-T
100 _aVICARY, RICHARD
245 0 _aTHAMES AND HUDSON MANUAL OF ADVANCED LITHOGRAPHY
260 _aLONDON
_bTHAMES AND HUDSON
_c1977
300 _bPB
_a192
942 _cGB
999 _c8629
_d8629